Tetrakis(dimethylamino)silane1624-01-7100 % similar (Dimethylamino)trimethylsilane2083-91-243 % similar N,N,N′,N′,1,1-Hexamethylsilanediamine3768-58-943 % similar 1,2-Bis((dimethylamino)dimethylsilyl)ethane91166-50-635 % similar