N,N,N′,N′,1,1-Hexamethylsilanediamine3768-58-9100 % similar (Dimethylamino)trimethylsilane2083-91-247 % similar Tetrakis(dimethylamino)silane1624-01-743 % similar N,N,N′,N′-Tetraethyl-1,1-dimethylsilanediamine4669-59-432 % similar