2-Ethoxy-2,4,4,6,6-pentafluoro-2λ5,4λ5,6λ5-1,3,5,2,4,6-triazatriphosphorine33027-66-6100 % similar Hexafluorocyclotriphosphazene15599-91-439 % similar Triethyl phosphate78-40-031 % similar Bromodifluoromethyl diethylphosphonate65094-22-631 % similar