1-Chloro-1,1,2,2,2-pentamethyldisilane1560-28-7100 % similar 1,2-Dichloro-1,1,2,2-tetramethyldisilane4342-61-462 % similar Hexamethyldisilane1450-14-238 % similar Tetrakis(trimethylsilyl)silane4098-98-033 % similar Trimethylsilyl chloride75-77-431 % similar Dimethyldichlorosilane75-78-531 % similar Methyltrichlorosilane75-79-631 % similar